Abstract
To realize the detection of multiple hydrocarbon combustible gases by non-dispersive infrared gas concentration sensors (NDIR), a tunable infrared pyroelectric sensitive element needs to be developed. This paper is based on the principle of the interferometer, which adopts a T-type over-damped spring suspension to fix the two reflectors, and utilizes electrostatic force to control the distance between the two reflectors to achieve the adjustment of the central wavelength of the infrared pyroelectric sensitive element. The developed tunable infrared pyroelectric sensitive element has a center wavelength adjustment range of 3000-3481nm, a stable adjustment time of less than 55ms, a temperature fluctuation of less than 4nm/K, and an imprecise spectral scanning in the range of 3000-4000nm. This type of component has fast, low-temperature drift and a wide range of center wavelength adjustment functions, as well as non-precise spectral scanning functions. It provides reliable support for the detection of different types of hydrocarbon combustible gases by the same NDIR sensor.