Synthesis of hydrogen-doped zinc oxide transparent conductive films by RF magnetron sputtering
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/54/i=1S/a=01AD07/pdf
Reference30 articles.
1. Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
2. Group III Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
3. Highty Conductive and Transparent Silicon Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
4. Highly transparent and conductive group IV impurity‐doped ZnO thin films prepared by radio frequency magnetron sputtering
5. Influence of discharge parameters on the layer properties of reactive magnetron sputtered ZnO:Al films
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