Annealing effect on the electrical properties and composition of a NiCrAl thin film resistor
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/54/i=12/a=125502/pdf
Reference30 articles.
1. TCR control of Ni–Cr resistive film deposited by DC magnetron sputtering
2. Microstructural and mechanical characteristics of Ni–Cr thin films
3. Electrical Properties of Ni–Cr–N Thin Films Deposited by Multitarget Reactive Sputtering
4. Effect of Cr content on mechanical and electrical properties of Ni–Cr thin films
5. The electromechanical behavior of nichrome (80/20 wt.%) film
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Achieving high sheet resistance and near-zero temperature coefficient of resistance in NiCr film resistors by Al interlayers;Journal of Alloys and Compounds;2024-11
2. Investigation of a Hybrid Approach for Normally-Off GaN HEMTs Using Fluorine Treatment and Recess Etch Techniques;IEEE Journal of the Electron Devices Society;2019
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