Achieving high sheet resistance and near-zero temperature coefficient of resistance in NiCr film resistors by Al interlayers-Reference-Cited by-同舟云学术

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Achieving high sheet resistance and near-zero temperature coefficient of resistance in NiCr film resistors by Al interlayers

Published:2024-11 Issue: Volume:1004 Page:175936
ISSN:0925-8388
Container-title:Journal of Alloys and Compounds
language:en
Short-container-title:Journal of Alloys and Compounds

Author:

Feng Guanqun,Pan Zhengcan,Wang Can,Li Nianguang,Shi Yan,Yan Yu,Lu Xianyang,Xu Yongbing

Funder

Natural Science Foundation of Jiangsu Province

Publisher

Elsevier BV

Reference31 articles.

1. The manipulation of temperature coefficient resistance of TaN thin-film resistor by supercritical CO 2 fluid.;Chen;IEEE Electron Device Lett.,2015

2. Effect of deposition temperature on the structural and electrical properties of NiCr thin-film resistors by magnetron cosputtering.;Nguyen;J. Electrochem. Soc.,2006

3. Chemically integrated nickel-based resistors on printed circuits and its resistance precisely controlled;Zhou;J. Mater. Sci. Mater. Electron.,2021

4. Near zero temperature coefficient of resistivity in antiperovskite Mn3Ni1− xCuxN.;Ding;Appl. Phys. Lett.,2011

5. Achievement of zero temperature coefficient of resistance with RuO x thin film resistors;KimYong Tae;Appl. Phys. Lett.,1997

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