Low-pass secondary electron detector for outlens scanning electron microscopy
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/54/i=8/a=088001/pdf
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1. Characterization of metal-induced lateral crystallization of amorphous SiGe on insulating film
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