Three-dimensional hydrogen silsesquioxane nanostructure fabrication by reversal room-temperature nanoimprint using poly(dimethylsiloxane) mold
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/54/i=6S1/a=06FM05/pdf
Reference33 articles.
1. Imprint of sub‐25 nm vias and trenches in polymers
2. Imprint Lithography with 25-Nanometer Resolution
3. Nanoimprint lithography
4. Nonlinear optical polymer patterned by nanoimprint lithography as a photonic crystal waveguide structure
5. Direct Fabrication of Photonic Crystal on Glass Substrate by Nanoimprint Lithography
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Double nanoimprint lithography: A technology for effectively reducing feature size;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-11
2. Pressure free nanoimprinting lithography using ladder-type HSQ material for LSPR biosensor chip;Sensors and Actuators B: Chemical;2017-04
3. Fabrication of free-standing subwavelength metal–insulator–metal gratings using high-aspect-ratio nanoimprint techniques;Japanese Journal of Applied Physics;2016-05-25
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