Genesis of focused ion beams for plasma nanotechnology using a bounded microwave plasma source
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/54/i=1S/a=01AA06/pdf
Reference27 articles.
1. Collisionless Damping of Electrostatic Plasma Waves
2. Penetration and screening of perpendicularly launched electromagnetic waves through bounded supercritical plasma confined in multicusp magnetic field
3. Experimental investigation of standing wave interactions with a magnetized plasma in a minimum-B field
4. Ion implantation into inner wall surface of millimeter size diameter steel tube by plasma source ion implantation
5. Low Temperature Growth of Carbon Nanomaterials on the Polymer Substrate Using Ion Assisted Microwave Plasma CVD
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1. Experimental realization of nonlinear demagnification in plasma-based charged particle optics;Plasma Research Express;2022-05-27
2. Variable gaseous ion beams from plasmas driven by electromagnetic waves for nano-micro structuring: a tutorial and an overview of recent works and future prospects;Plasma Research Express;2020-08-03
3. Effect of plasma and beam parameters on focal dimensions in micrometer charged particle optics: Enhanced nonlinear demagnification below the Debye length;Physics of Plasmas;2019-06
4. Characterization of microwave plasma in a multicusp using 2D emission based tomography: Bessel modes and wave absorption;Physics of Plasmas;2017-06
5. Momentum transfer using variable gaseous plasma ion beams and creation of high aspect ratio microstructures;Journal of Applied Physics;2017-03-28
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