Momentum transfer using variable gaseous plasma ion beams and creation of high aspect ratio microstructures-Reference-Cited by-同舟云学术

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Momentum transfer using variable gaseous plasma ion beams and creation of high aspect ratio microstructures

Published:2017-03-28 Issue:12 Volume:121 Page:123302
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Maurya Sanjeev Kumar¹,Paul Samit²,Shah Jay Kumar³,Chatterjee Sanghamitro¹,Bhattacharjee Sudeep¹

Affiliation:

1. Department of Physics, Indian Institute of Technology-Kanpur, Kanpur 208016, India

2. Department of Physics, Karimpur Pannadevi College, Karimpur 741152, West Bengal, India

3. Department of Civil Engineering, Curtin University, Perth 6102, Western Australia, Australia

Funder

Department of Science and Technology, Ministry of Science and Technology (DST)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4979025

Reference41 articles.

1. Fabrication of Sub-5 nm Nanochannels in Insulating Substrates Using Focused Ion Beam Milling

2. A review of focused ion beam milling techniques for TEM specimen preparation

3. Patterning Metallic Nanostructures by Ion-Beam-Induced Dewetting and Rayleigh Instability

4. Nanometer Patterning with Ice

5. Nanopantography: A New Method for Massively Parallel Nanopatterning over Large Areas

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1. Electric field driven focusing and transport of plasma ion beams by micro-glass capillaries beyond the self-focusing limit;Journal of Physics D: Applied Physics;2024-07-18

2. Electron Capture by Proton Beam in Collisions with Water Vapor;Atoms;2023-01-27

3. Experimental realization of nonlinear demagnification in plasma-based charged particle optics;Plasma Research Express;2022-05-27

4. Variable gaseous ion beams from plasmas driven by electromagnetic waves for nano-micro structuring: a tutorial and an overview of recent works and future prospects;Plasma Research Express;2020-08-03

5. Effect of plasma and beam parameters on focal dimensions in micrometer charged particle optics: Enhanced nonlinear demagnification below the Debye length;Physics of Plasmas;2019-06

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