Effect of photodecomposable quencher on latent image quality in extreme ultraviolet lithography
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/53/i=6/a=066508/pdf
Reference43 articles.
1. Chemical amplification in the design of dry developing resist materials
2. Chemical Amplification Resists for Microlithography
3. Effect of Acid Diffusion on Resolution of a Chemically Amplified Resist in X-Ray Lithography
4. Determination of acid diffusion in chemical amplification positive deep ultraviolet resists
5. The Effect of an Organic Base in Chemically Amplified Resist on Patterning Characteristics Using KrF Lithography
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Understanding the onset of EUV resist chemical stochastics;Japanese Journal of Applied Physics;2023-06-01
2. Theoretical study of relationships among resolution, line width roughness, and sensitivity of chemically amplified extreme ultraviolet resists with photodecomposable quenchers;Japanese Journal of Applied Physics;2016-10-06
3. Optimum concentration ratio of photodecomposable quencher to acid generator in chemically amplified extreme ultraviolet resists;Japanese Journal of Applied Physics;2015-10-29
4. Effects of diffusion constant of photodecomposable quencher on chemical gradient of chemically amplified extreme-ultraviolet resists;Japanese Journal of Applied Physics;2015-04-21
5. Effects of dose shift on line width, line edge roughness, and stochastic defect generation in chemically amplified extreme ultraviolet resist with photodecomposable quencher;Japanese Journal of Applied Physics;2014-12-08
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3