Advanced metallization concepts and impact on reliability-Reference-Cited by-同舟云学术

Advanced metallization concepts and impact on reliability

Published:2014-04-22 Issue:5S2 Volume:53 Page:05GA11
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Hauschildt Meike,Hintze Bernd,Gall Martin,Koschinsky Frank,Preusse Axel,Bolom Tibor,Nopper Markus,Beyer Armand,Aubel Oliver,Talut Georg,Zschech Ehrenfried

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/53/i=5S2/a=05GA11/pdf

Reference61 articles.

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