Synthesis of α-SiC from tetramethylsilane by chemical vapor deposition at high temperature-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Synthesis of α-SiC from tetramethylsilane by chemical vapor deposition at high temperature

Published:2014-01-09 Issue:2 Volume:7 Page:025501
ISSN:1882-0778
Container-title:Applied Physics Express
language:
Short-container-title:Appl. Phys. Express

Author:

Jeong Seong-Min,Nam Deok-Hui,Kim Byeong Geun,Yoon Ji-Young,Lee Myung-Hyun,Kim Kyung-Hun,Yoon Young Joon,Seo Won-Seon

Publisher

IOP Publishing

Subject

General Physics and Astronomy,General Engineering

Link

http://stacks.iop.org/1882-0786/7/i=2/a=025501/pdf

Reference14 articles.

1. A morphological and structural study of SiC layers obtained by LPCVD using tetramethylsilane

2. Investigation of the chemical vapor deposition of silicon carbide from tetramethylsilane by in situ temperature and gas composition measurements

3. Influence of temperature and tetramethylsilane partial pressure on the β-SiC deposition by cold wall chemical vapor deposition

4. Growth and properties of CVD-SiC layers using tetramethylsilane

5. β-SiC deposition by hot-wall MOCVD using tetramethylsilane

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High-throughput thermodynamic study of SiC high-temperature chemical vapor deposition from TMS-H2;Journal of Crystal Growth;2024-01

2. A case study on laminar flame propagation of flame synthesis precursors using spherically propagating flame: Tetramethylsilane and its alkane counterpart;Proceedings of the Combustion Institute;2022-08

3. Comparative investigation on tetramethylsilane and neopentane combustion: Jet-stirred reactor pyrolysis and kinetic modeling;Combustion and Flame;2022-03

4. A review of the simulation studies on the bulk growth of silicon carbide single crystals;Journal of the Korean Ceramic Society;2022-02-18

5. High-rate, room-temperature synthesis of amorphous silicon carbide films from organo-silicon in high-density helicon wave plasma;Vacuum;2019-06

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3