Formation of 0.3-nm-high stepped polymer surface by thermal nanoimprinting-Reference-Cited by-同舟云学术

Formation of 0.3-nm-high stepped polymer surface by thermal nanoimprinting

Published:2014-04-17 Issue:5 Volume:7 Page:055202
ISSN:1882-0778
Container-title:Applied Physics Express
language:
Short-container-title:Appl. Phys. Express

Author:

Tan Geng,Inoue Naoya,Funabasama Tomoyuki,Mita Masahiro,Okuda Norimichi,Mori Junichi,Koyama Koji,Kaneko Satoru,Nakagawa Masaru,Matsuda Akifumi,Yoshimoto Mamoru

Publisher

IOP Publishing

Subject

General Physics and Astronomy,General Engineering

Link

http://stacks.iop.org/1882-0786/7/i=5/a=055202/pdf

Reference27 articles.

1. Imprint of sub‐25 nm vias and trenches in polymers

2. Three-Dimensional Nanoimprint Mold Fabrication by Focused-Ion-Beam Chemical Vapor Deposition

3. Fabrication of Thermally Durable Sub-wavelength Periodic Structures upon Inorganic–Organic Hybrid Materials by Nano-imprinting

4. Imprint Lithography with 25-Nanometer Resolution

5. Large scale nanolithography using nanoimprint lithography

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