Opportunities of CMOS-MEMS integration through LSI foundry and open facility-Reference-Cited by-同舟云学术

Opportunities of CMOS-MEMS integration through LSI foundry and open facility

Published:2017-05-19 Issue:6S1 Volume:56 Page:06GA03
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Mita Yoshio,Lebrasseur Eric,Okamoto Yuki,Marty Frédéfic,Setoguchi Ryota,Yamada Kentaro,Mori Isao,Morishita Satoshi,Imai Yoshiaki,Hosaka Kota,Hirakawa Atsushi,Inoue Shu,Kubota Masanori,Denoual Matthieu

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/56/i=6S1/a=06GA03/pdf

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