Feature profile simulation of silicon nitride atomic layer deposition
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/56/i=6S2/a=06HE07/pdf
Reference45 articles.
1. Atomic Layer Deposition: An Overview
2. Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
3. Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources
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