Depth analysis of molecular orientation induced by nanoimprint graphoepitaxy-Reference-Cited by-同舟云学术

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Depth analysis of molecular orientation induced by nanoimprint graphoepitaxy

Published:2017-03-03 Issue:4 Volume:56 Page:040302
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Okada Makoto,Fujii Ryosuke,Haruyama Yuichi,Ono Hiroshi,Kawatsuki Nobuhiro,Matsui Shinji

Funder

Japan Society for the Promotion of Science

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/56/i=4/a=040302/pdf

Reference33 articles.

1. Imprint of sub‐25 nm vias and trenches in polymers

2. Imprint Lithography with 25-Nanometer Resolution

3. Sub-10 nm imprint lithography and applications

4. Mold-assisted nanolithography: A process for reliable pattern replication

5. Step and flash imprint lithography: Template surface treatment and defect analysis

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nanoimprint Graphoepitaxy for Molecularly Oriented Nanofabrication;Journal of Photopolymer Science and Technology;2017

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