Mass Spectrometric Analysis in RF Reactive Sputtering Discharge
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/13/i=S1/a=505/pdf
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5. Vapour deposited coatings;Smithells Metals Reference Book;1992
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