130 kV High-Resolution Electron Beam Lithography System for Sub-10-nm Nanofabrication
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference32 articles.
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2. Laser Scanning Holographic Lithography for Flexible 3D Fabrication of Multi-Scale Integrated Nano-structures and Optical Biosensors;Scientific Reports;2016-02-29
3. Compact polarization beam splitter for silicon-based slot waveguides based on an asymmetrical multimode interference coupler;SPIE Proceedings;2015-03-16
4. Compact Polarization Beam Splitter for Silicon-Based Slot Waveguides Using an Asymmetrical Multimode Waveguide;Journal of Lightwave Technology;2014-12-15
5. A compact polarization converter for silicon-based slot waveguides using a hybrid plasmonic effect;Journal of Optics;2014-08-01
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