Novel Structure of Double-H Tuning Fork for Dual-Axis Quartz Micro-Electro-Mechanical System Angular Rate Sensor-Reference-Cited by-同舟云学术

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Novel Structure of Double-H Tuning Fork for Dual-Axis Quartz Micro-Electro-Mechanical System Angular Rate Sensor

Published:2013-09-01 Issue:9R Volume:52 Page:090207
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Zhao Ke,Feng Lihui,Wang Qianqian,Cui Fang,Sun Yunan

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference27 articles.

1. A phase-based amplitude regulation for gyroscope drive loops

2. Design and simulation of an angular-rate vibrating microgyroscope

3. Tuning fork silicon angular rate sensor with enhanced performance for automotive applications

4. A ${\rm Z}$-Axis Quartz Tuning Fork Micromachined Gyroscope Based on Shear Stress Detection

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Copper cladding on polymer surfaces by ionization-assisted deposition;Japanese Journal of Applied Physics;2018-02-09

2. ANSYS simulation of the capacitance coupling of quartz tuning fork gyroscope;SPIE Proceedings;2013-12-20

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