Fabrication of Silicon Microdisk Resonators with Movable Waveguides for Control of Power Coupling Ratio
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference35 articles.
1. A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator
2. MEMS-actuated microdisk resonators with variable power coupling ratios
3. Silicon Microtoroidal Resonators With Integrated MEMS Tunable Coupler
4. Tunable coupling regimes of silicon microdisk resonators using MEMS actuators
5. High confinement suspended micro-ring resonators in silicon-on-insulator
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1. Improvement of silicon microdisk resonators with movable waveguides by hydrogen annealing treatment;Journal of Vacuum Science & Technology B;2021-05
2. Tuning of 2D rod-type photonic crystal cavity for optical modulation and impact sensing;MOEMS and Miniaturized Systems XVIII;2019-03-04
3. Performance analysis and improvement of semiconductor optical amplifier direct modulation with assistance of microring resonator notch filter;Optical and Quantum Electronics;2017-02-25
4. Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators;Micromachines;2016-04-16
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