Improvement of silicon microdisk resonators with movable waveguides by hydrogen annealing treatment-Reference-Cited by-同舟云学术

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Improvement of silicon microdisk resonators with movable waveguides by hydrogen annealing treatment

Published:2021-05 Issue:3 Volume:39 Page:030602
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Okatani Taiyu¹,Sato Yuichi²,Imai Kaoru¹,Hane Kazuhiro²,Kanamori Yoshiaki¹^ORCID

Affiliation:

1. Graduate School of Engineering, Department of Robotics, Tohoku University, 6-6-01 Aoba, Aramaki, Aoba-ku, Sendai, Miyagi, Japan

2. Graduate School of Engineering, Department of Finemechanics, Tohoku University, 6-6-01 Aoba, Aramaki, Aoba-ku, Sendai, Miyagi, Japan

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

https://avs.scitation.org/doi/pdf/10.1116/6.0000971

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Phase-Controllable Spoof Surface Plasmon Coupling From Bull's Eye Aperture to Planar Silicon Waveguide in the Terahertz Band;IEEE Transactions on Terahertz Science and Technology;2024-07

2. Fabrication of high-aspect-ratio SiO₂ nanopillars by Si thermal oxidation for metalenses in the visible region;Japanese Journal of Applied Physics;2023-03-23

3. Improvement of imaging performance of silicon micropore X-ray optics by ultra long-term annealing;Optics Express;2022-06-27

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