Formation of Silicon-on-Nothing Structures with Extremely Flat Surfaces-Reference-Cited by-同舟云学术

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Formation of Silicon-on-Nothing Structures with Extremely Flat Surfaces

Published:2013-07-01 Issue:7R Volume:52 Page:075601
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Sudoh Koichi,Nakamura Jun,Naito Muneyuki,Higuchi Kohei,Maenaka Kazusuke

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference22 articles.

1. Silicon-on-Nothing (SON)-an innovative process for advanced CMOS

2. Horizontal buried channels in monocrystalline silicon

3. Silicon on nothing MEMS electromechanical resonator

4. Empty-space-in-silicon technique for fabricating a silicon-on-nothing structure

5. Micro-structure Transformation of Silicon: A Newly Developed Transformation Technology for Patterning Silicon Surfaces using the Surface Migration of Silicon Atoms by Hydrogen Annealing

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Simulation of the Void Shape Evolution of High-Temperature Annealed Silicon Structures by means of a Custom Level-Set Formulation;Crystals;2023-05-24

2. Self-assembled silicon membrane resonator for high vacuum pressure sensing;Vacuum;2022-07

3. PCA-based sub-surface structure and defect analysis for germanium-on-nothing using nanoscale surface topography;Scientific Reports;2022-05-03

4. Formation, evolution, and prevention of thermally induced defects on germanium and silicon upon high-temperature vacuum annealing;Journal of Vacuum Science & Technology A;2021-12

5. A review: crystalline silicon membranes over sealed cavities for pressure sensors by using silicon migration technology;Journal of Semiconductors;2018-07

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