Optical properties of AlN films deposited by energy-filtering magnetron sputtering technique-Reference-Cited by-同舟云学术

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Optical properties of AlN films deposited by energy-filtering magnetron sputtering technique

Published:2020-01-09 Issue:2 Volume:13 Page:025502
ISSN:1882-0778
Container-title:Applied Physics Express
language:
Short-container-title:Appl. Phys. Express

Author:

Wang Xiaoni,Wang Zhaoyong,Tian Weimin,Han Yanbing,Yao Ning

Funder

Science and Technology Projects of Henan Province

Publisher

IOP Publishing

Subject

General Physics and Astronomy,General Engineering

Link

https://iopscience.iop.org/article/10.7567/1882-0786/ab65a1/pdf

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Evolution of 2-Inch Aln Single Crystal Grown on Sic Seed Via Pvt Method;2024

2. Evolution of 2-Inch Aln Single Crystal Grown on Sic Seed Using Pvt Method;2023

3. Excellent electroluminescence and electrical characteristics from p-CuO/i-Ga2O3/n-GaN light-emitting diode prepared by magnetron sputtering;Journal of Luminescence;2022-03

4. Influence of nitrogen flow ratio on properties of c-axis oriented AlN films grown by RF magnetron sputtering;Applied Physics A;2021-10-06

5. Optical and structural properties of AlN thin films deposited on different faces of sapphire substrates;Semiconductor Science and Technology;2021-03-04

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