Evaluation of a Single-Crystal-Silicon Microelectromechanical Systems Resonator Utilizing a Narrow Gap Process
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference22 articles.
1. Silicon Fishbone-Shaped MEMS Resonator with Digitally Variable Resonant-Frequency Tuning
2. Silicon Beam Resonator Utilizing the Third-Order Bending Mode
3. VHF free-free beam high-Q micromechanical resonators
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