Application of Solid Immersion Lens-Based Near-Field Recording Technology to High-Speed Plasmonic Nanolithography-Reference-Cited by-同舟云学术

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Application of Solid Immersion Lens-Based Near-Field Recording Technology to High-Speed Plasmonic Nanolithography

Published:2012-08-01 Issue:8S2 Volume:51 Page:08JF01
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Park Kyoung-Su,Kim Taeseob,Lee Won-Sup,Joe Hang-Eun,Min Byung-Kwon,Park Young-Pil,Yang Hyunseok,Kang Sung-Mook,Park No-Cheol

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference24 articles.

1. Scanning near-field photolithography—surface photochemistry with nanoscale spatial resolution

2. The Art of SPM: Scanning Probe Microscopy in Materials Science

3. Matching the Resolution of Electron Beam Lithography by Scanning Near-Field Photolithography

4. Scanning Probe Nanolithography and Protein Patterning of Low-Fouling Plasma Polymer Multilayer Films

5. High-Field Scanning Probe Lithography in Hexadecane: Transitioning from Field Induced Oxidation to Solvent Decomposition through Surface Modification

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High-Speed Parallel Plasmonic Direct-Writing Nanolithography Using Metasurface-Based Plasmonic Lens;Engineering;2021-11

2. Experimental demonstration of line-width modulation in plasmonic lithography using a solid immersion lens-based active nano-gap control;Applied Physics Letters;2015-02-02

3. Improvement of focusing characteristics of a spiral plasmonic lens;Optical Review;2014-09

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