High-resolution and nondestructive profile measurement by spectral-domain optical coherence tomography with a visible broadband light source for optical-device fabrication-Reference-Cited by-同舟云学术

High-resolution and nondestructive profile measurement by spectral-domain optical coherence tomography with a visible broadband light source for optical-device fabrication

Published:2016-07-19 Issue:8S3 Volume:55 Page:08RE05
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Nishi Tsuyoshi,Ozaki Nobuhiko,Oikawa Yoichi,Miyaji Kunio,Ohsato Hirotaka,Watanabe Eiichiro,Ikeda Naoki,Sugimoto Yoshimasa

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/55/i=8S3/a=08RE05/pdf

Reference30 articles.

1. Diode Lasers and Photonic Integrated Circuits

2. Handbook of Ellipsometry

3. Optical Coherence Tomography

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