Non-destructive and non-contact measurement of semiconductor optical waveguide using optical coherence tomography with a visible broadband light source-Reference-Cited by-同舟云学术

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Non-destructive and non-contact measurement of semiconductor optical waveguide using optical coherence tomography with a visible broadband light source

Published:2018-07-10 Issue:8S2 Volume:57 Page:08PE03
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Ishida Kazumasa,Ozaki Nobuhiko^ORCID,Ohsato Hirotaka,Watanabe Eiichiro,Ikeda Naoki,Sugimoto Yoshimasa

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/57/i=8S2/a=08PE03/pdf

Reference31 articles.

1. Diode Lasers and Photonic Integrated Circuits

2. The commercialization of silicon photonics

3. Large single-mode rib waveguides in GeSi-Si and Si-on-SiO/sub 2/

4. Silicon-on-insulator optical rib waveguide loss and mode characteristics

5. The single-mode condition for semiconductor rib waveguides with large cross section

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Mass transfer, detection and repair technologies in micro-LED displays;Science China Materials;2022-06-06

2. OCT with a Visible Broadband Light Source Applied to High-Resolution Nondestructive Inspection for Semiconductor Optical Devices;Optical Coherence Tomography and Its Non-medical Applications;2020-05-27

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