Discharge of viscous UV-curable resin droplets by screen printing for UV nanoimprint lithography-Reference-Cited by-同舟云学术

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Discharge of viscous UV-curable resin droplets by screen printing for UV nanoimprint lithography

Published:2016-05-17 Issue:6S1 Volume:55 Page:06GM01
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Tanabe Akira,Uehara Takuya,Nagase Kazuro,Ikedo Hiroaki,Hiroshiba Nobuya,Nakamura Takahiro,Nakagawa Masaru

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/55/i=6S1/a=06GM01/pdf

Reference31 articles.

1. Imprint of sub‐25 nm vias and trenches in polymers

2. Imprint Lithography with 25-Nanometer Resolution

3. Nanoimprint lithography

4. Mold-assisted nanolithography: A process for reliable pattern replication

5. 32 nm imprint masks using variable shape beam pattern generators

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of thickness of surface silicon oxide on liquid advancement in nanogaps between synthetic quartz mold and silicon substrate surfaces in UV nanoimprinting;Japanese Journal of Applied Physics;2024-03-18

2. Selecting adhesive molecular layers with matched surface free energy and chemisorption for shape-fixed UV-cured thin films fabricated by laser-drilled screen printing and UV nanoimprinting;Japanese Journal of Applied Physics;2023-02-16

3. Micro-print and nano-imprint methods combining laser-drilled screen printing and ultraviolet nanoimprint lithography: a review;Japanese Journal of Applied Physics;2022-05-20

4. Suppression of resist pattern collapse by crosslinker in ultraviolet nanoimprinting involving sequential infiltration synthesis with trimethylaluminum;Journal of Vacuum Science & Technology B;2021-05

5. “Print-and-Imprint” Method : Novel Nanoimprint Technology Based on Laser-Drilled Screen Printing;Vacuum and Surface Science;2020-11-10

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