Irradiation conditions of gas cluster ion beam for surface-activated bonding
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/57/i=2S1/a=02BA02/pdf
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1. Effect of Surface Roughness on Room-Temperature Wafer Bonding by Ar Beam Surface Activation
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4. Surface topography and composition of NiPd alloys under oblique and normal gas cluster ion beam irradiation;Surface Science;2020-10
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