Electric transport properties for three-dimensional angular-interconnects of Au wires crossing facet edges of atomically-flat Si{111} surfaces-Reference-Cited by-同舟云学术

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Electric transport properties for three-dimensional angular-interconnects of Au wires crossing facet edges of atomically-flat Si{111} surfaces

Published:2018-07-26 Issue:9 Volume:57 Page:090303
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Takemoto Shohei,Hattori Azusa N.,Hattori Ken,Tanaka Hidekazu,Daimon Hiroshi

Funder

Ministry of Education, Culture, Sports, Science and Technology

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/57/i=9/a=090303/pdf

Reference34 articles.

1. FinFET-a self-aligned double-gate MOSFET scalable to 20 nm

2. Multiple-gate SOI MOSFETs

3. A 22nm high performance and low-power CMOS technology featuring fully-depleted tri-gate transistors, self-aligned contacts and high density MIM capacitors

4. Dependence of resistivity on surface profile in nanoscale metal films and wires

5. The top-down fabrication of a 3D-integrated, fully CMOS-compatible FET biosensor based on vertically stacked SiNWs and FinFETs

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Accessibility of ARPES for Three-dimensionally Architected Si{111}7×7 Facet Surfaces on Micro-patterned Si(110);e-Journal of Surface Science and Nanotechnology;2022-07-28

2. Nanofabrication and Physical Properties Investigation on the Three-dimensional Surfaces =Diversity and Inclusion in Surface Science=;Vacuum and Surface Science;2021-03-10

3. Atomically Architected Silicon Pyramid Single-Crystalline Structure Supporting Epitaxial Material Growth and Characteristic Magnetism;Crystal Growth & Design;2021-01-06

4. Creation and Evaluation of Atomically Ordered Side- and Facet-Surface Structures of Three-Dimensional Silicon Nano-Architectures;21st Century Surface Science - a Handbook;2020-11-26

5. Development of Methods of Creating and Observing Atomically-ordered Side-surfaces on Three-dimensionally Architected Si Substrates;Vacuum and Surface Science;2019-07-10

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