Microanalysis of silicon protrusions with a titanium cap formed via surface melting and solidification under applied tensile stress
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/58/i=2/a=025501/pdf
Reference38 articles.
1. Single-pulse excimer laser nanostructuring of silicon: A heat transfer problem and surface morphology
2. Pulsed-laser-induced nanoscale island formation in thin metal-on-oxide films
3. Nanoparticle formation in Au thin films by electron-beam-induced dewetting
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1. Effect of a magnetic field on fabrication of Si protrusions by local surface melting of a narrow current path on a Si wafer via resistive heating;Japanese Journal of Applied Physics;2023-03-01
2. In situ observation of formation of Si protrusions by local melting of a Si narrow current path using resistive heating together with electron beam irradiation;Japanese Journal of Applied Physics;2022-05-30
3. Fabrication of Si protrusions by local melting of a narrow current path on a Si wafer via resistive heating;Japanese Journal of Applied Physics;2021-12-01
4. Silicon protrusions with caps containing precipitates of iron silicides fabricated via liquid-phase epitaxy under a temperature distribution with a local maximum caused by applied tensile stress;Japanese Journal of Applied Physics;2020-07-20
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