Global model analysis of Ar inductively coupled plasma driven by a 150 kHz-band high-power pulse burst
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/58/i=SA/a=SAAB06/pdf
Reference30 articles.
1. Review of inductively coupled plasmas for plasma processing
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3. Plasma generation and plasma sources
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5. Ionized physical vapor deposition (IPVD): A review of technology and applications
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