Effects of an in-situ SiN x interlayer on structural and optical properties for nonpolar a-plane GaN epilayers-Reference-Cited by-同舟云学术

Effects of an in-situ SiN x interlayer on structural and optical properties for nonpolar a-plane GaN epilayers

Published:2020-01-01 Issue:1 Volume:59 Page:010909
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Zhao Jianguo^ORCID,Zhang Xiong,Fan Aijie,Chen Shuai,He Jiaqi,Pan Jiangyong,Chen Daihua,Tian Ming,Feng Zhe Chuan,Chang Jianhua,Liu Qingquan,Ge Junxiang

Funder

the Natural Science Foundation of the Jiangsu Higher Education Institutions of China

the Startup Foundation for Introducing Talent of NUIST

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

https://iopscience.iop.org/article/10.7567/1347-4065/ab6004/pdf

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1. Improved characteristics of (11 2‾2) plane AlGaN films grown on SiNx interlayer;Materials Science in Semiconductor Processing;2024-10

2. Impacts of specific element-treated three-dimensional GaN layer on characteristics of nonpolar a-plane GaN film;Journal of Vacuum Science & Technology A;2023-08-10

3. Enhanced structural and optical properties of semipolar (112¯2) AlGaN film with insertion of AlN/AlGaN superlattice;Journal of Vacuum Science & Technology A;2023-07-26

4. Effects of Buffer Layer on Structural Properties of Nonpolar (112¯0)-Plane GaN Film;Crystals;2023-07-22

5. Effects of Dual Moderate-Temperature-Grown AIN Interlayers on Structural and Optical Properties of Semipolar (1122) AIN Film;Materials Science Forum;2023-05-31