Physical and electrical properties of ALD-Al2O3/GaN MOS capacitor annealed with high pressure water vapor
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://iopscience.iop.org/article/10.7567/1347-4065/ab09a2/pdf
Reference40 articles.
1. Insulated gate and surface passivation structures for GaN-based power transistors
2. Characterization of interface states in Al2O3/AlGaN/GaN structures for improved performance of high-electron-mobility transistors
3. Vertical GaN p-n Junction Diodes With High Breakdown Voltages Over 4 kV
4. 400-A (Pulsed) Vertical GaN p-n Diode With Breakdown Voltage of 700 V
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1. Surface Oxidation of GaN(0001) Simulated by Charge‐Transfer‐Type Molecular Dynamics;physica status solidi (b);2024-02-29
2. Impact of Nitrogen Concentration and Post‐Deposition Annealing on Electrical Properties of AlON/Etched N‐GaN MOS Capacitors;Advanced Electronic Materials;2023-12-07
3. Impact of post-deposition anneal on ALD Al2O3/etched GaN interface for gate-first MOSc-HEMT;Power Electronic Devices and Components;2023-03
4. Atomic structure analysis of gallium oxide at the Al2O3/GaN interface using photoelectron holography;Applied Physics Express;2022-07-13
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