Thick-film PZT-metallic triple beam resonator

Author:

Yan T.,Jones B.E.,Rakowski R.T.,Tudor M.J.,Beeby S.P.,White N.M.

Publisher

Institution of Engineering and Technology (IET)

Subject

Electrical and Electronic Engineering

Reference4 articles.

1. Thick-film PZT-silicon micromechanical resonator

2. Jones, B.E., and White, N.M.: ‘Metallic resonators’, (GB0302585.5)

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