Thick-film PZT-silicon micromechanical resonator
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_20001139?crawler=true&mimetype=application/pdf
Reference6 articles.
1. Processing of PZT piezoelectric thick films on silicon for microelectromechancial systems
2. Thick film PZT/micromachined silicon accelerometer
3. Thomson, W.: ‘Theory of vibration with applications’, (Allen & Unwin London 1988)
4. Miniaturization of Tuning Forks
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