Transient annealing of modulation-doped GaAs/AlxGa1−xAs heterostructures
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_19840256?crawler=true&mimetype=application/pdf
Reference12 articles.
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3. Rapid Thermal Annealing of Ion Implanted Semiconductors;Nuclear Physics Applications on Materials Science;1988
4. Ion Implantation and RTA in III-V Materials;MRS Proceedings;1988
5. Chapter 2 Factors Affecting the Performance of (Al,Ga)As/GaAs and (Al,Ga)As/InGaAs Modulation-Doped Field-Effect Transistors: Microwave and Digital Applications;Semiconductors and Semimetals;1987
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