Author:
Tang A.C.T.,Sealy B.J.,Rezazadeh A.A.
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Cited by
1 articles.
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1. Diffusion and deactivation characteristics in Be-implanted GaAs;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-03