Silicon on insulator pressure sensor based on a thermostable electrode for high temperature applications-Reference-Cited by-同舟云学术

Silicon on insulator pressure sensor based on a thermostable electrode for high temperature applications

Author:

Liu G.D.¹,Cui W.P.¹,Hu H.¹,Zhang F.S.¹,Zhang Y.X.¹,Gao C.C.¹²³,Hao Y.L.¹²⁴

Affiliation:

1. National Key Laboratory of Science and Technology on Micro/Nano FabricationPeking UniversityBeijing100871People's Republic of China

2. State Key Laboratory of Transducer TechnologyChinese Academy of SciencesShanghai200050People's Republic of China

3. Collaborative Innovation Center for Micro/Nano Fabrication Device and SystemBeijing100084People's Republic of China

4. Innovation Center for MicroNanoelectronics and Integrated SystemBeijing100871People's Republic of China

Publisher

Institution of Engineering and Technology (IET)

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering

Link

Reference21 articles.

4. A novel SOI pressure sensor for high temperature application;Li S.;J. Semicond.,2015

5. A silicon carbide capacitive pressure sensor for in‐cylinder pressure measurement;Li C.;Sens. Actuators A, Phys.,2008

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