Integration of microwave phase shifter with BST varactor onto TiO2/Si wafer
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_20070448?crawler=true&mimetype=application/pdf
Reference6 articles.
1. Silicon substrate integrated high Q-factor parallel-plate ferroelectric varactors for microwave/millimeterwave applications
2. High tunability (Ba,Sr)TiO3 thin films grown on atomic layer deposited TiO2 and Ta2O5 buffer layers
3. Integration of coplanar (Ba,Sr)TiO/sub 3/ microwave phase shifters onto Si wafers TiO/sub 2/ buffer layers
4. Real-time observations of interface formation for barium strontium titanate films on silicon
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1. Domain Matched Epitaxial Growth of Dielectric Thin Films;Materials Horizons: From Nature to Nanomaterials;2020
2. Low-temperature fabrication of Ba1−xSrxTiO3 thin films with good dielectric properties on platinized silicon substrates;Journal of the European Ceramic Society;2010-01
3. Tunable dual-mode filter using varactor and variable ring resonator on integrated BST/TiO2/Si substrate;Electronics Letters;2010
4. Influence of frequency and bias voltage on dielectric properties and electrical conductivity of Al/TiO2/p-Si/p+(MOS) structures;Journal of Physics D: Applied Physics;2008-10-13
5. Reconfigurable RF active bandpass filter with BaxSr1-xTiO3 varactor;Electronics Letters;2008
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