Design and analysis of piezoelectric MEMS micro‐speaker based on scandium‐doped AlN thin film
Author:
Affiliation:
1. State Key Laboratory of Precision Measuring Technology and Instruments Tianjin University Tianjin China
2. Nanotechnology Central Lab Electronics Research Institute (ERI) Cairo 11523 Egypt
Publisher
Institution of Engineering and Technology (IET)
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1049/mna2.12035
Reference17 articles.
1. Micromachined Piezoelectric Microspeaker
2. Stoppel F. et al.:New integrated full‐range MEMS speaker for in‐ear applications. In:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) vol.2018 pp.1068–1071.IEEE Piscataway NJ(2018)
3. Stoppel F. et al.:Novel membrane‐less two‐way MEMS loudspeaker based on piezoelectric dual‐concentric actuators. In:TRANSDUCERS 2017—19th International Conference on Solid‐State Sensors Actuators and Microsystems pp.2047–2050.IEEE Piscataway NJ(2017)
4. Spiral-Shaped Piezoelectric MEMS Cantilever Array for Fully Implantable Hearing Systems
5. Glacer C. et al.:Silicon microspeaker with out‐of‐plane displacement. In:9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE‐NEMS 2014) pp.12–16.IEEE Piscataway NJ(2014)
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