Experimental analysis of pull-out voltage of electrostatically actuated microcantilever beam based on contact-stiction model-Reference-Cited by-同舟云学术

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Experimental analysis of pull-out voltage of electrostatically actuated microcantilever beam based on contact-stiction model

Published:2011 Issue:1 Volume:6 Page:43
ISSN:1750-0443
Container-title:Micro & Nano Letters
language:en
Short-container-title:Micro Nano Lett.

Author:

Chakraborty S.,Bhattacharya A.,Bhattacharyya T.K.

Publisher

Institution of Engineering and Technology (IET)

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering

Link

https://digital-library.theiet.org/content/journals/10.1049/mnl.2010.0125?crawler=true&mimetype=application/pdf

Reference33 articles.

1. Rebeiz, G.M.: ‘RF MEMS: theory, design and technology’, (Wiley 2003)

2. Bao, M.: ‘Analysis and design principles of MEMS devices’, 1st(Elsevier 2005)

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4. Switching Voltage Analysis of Nanoelectromechanical Memory Switches for Monolithic 3-D CMOS-NEM Hybrid Reconfigurable Logic Circuits;IEEE Transactions on Electron Devices;2018-09

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