Author:
Tang A.C.T.,Gardner S.R.,Sealy B.J.,Gillin W.P.
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Reference10 articles.
1. Zolch, R., Ryssel, H., Kranz, H., Reichl, H., and Ruge, I.: Chenow, F., Ion implantation in semiconductors, (Plenum, NY 1977), p. 593
2. Wilkie, J.H.: ‘Rapid thermal annealing of acceptor implanted InP and InGaAs’, 1988, PhD thesis, University of Surrey, UK
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