Micro‐printing of patterned diamond‐like carbon coatings on glass by anodic bonding
Author:
Affiliation:
1. Key Laboratory of MEMS of Ministry of Education and Quantum Information Research CenterSoutheast UniversityNanjing210096People's Republic of China
Funder
National Natural Science Foundation of China
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1049/el.2018.8041
Reference8 articles.
1. History of diamond-like carbon films — From first experiments to worldwide applications
2. Enhanced reliability by diamond-like carbon in single-layer organic light emitting diodes
3. Field Assisted Glass‐Metal Sealing
4. Transfer of InP-based HBV epitaxy onto borosilicate glass substrate by anodic bonding
5. Analysis of Bonding‐Related Gas Enclosure in Micromachined Cavities Sealed by Silicon Wafer Bonding
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1. Fabrication and applications of the optical diamond-like carbon films: a review;Journal of Materials Science;2022-01-03
2. Microfabricated SERF Atomic Magnetometers for Measurement of Weak Magnetic Field;2020 IEEE 70th Electronic Components and Technology Conference (ECTC);2020-06
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