Affiliation:
1. State Key Laboratory for Manufacturing Systems EngineeringXi'an Jiaotong UniversityXi'an710054People's Republic of China
Funder
National Science Foundation
Publisher
Institution of Engineering and Technology (IET)
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering
Reference13 articles.
1. Progresses on micromachined flow sensors based on MEMS technologies;Peng J.;Adv. Mech.,2005
Cited by
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