Mathematical modeling of optical MEMS differential pressure sensor using waveguide Bragg gratings embedded in Mach Zehnder interferometer
Author:
Publisher
IOP Publishing
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Link
http://iopscience.iop.org/article/10.1088/2040-8986/aacf2a/pdf
Reference21 articles.
1. Realization of MOEMS pressure sensor using mach zehnder interferometer
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3. Modern trends in microstructures and integrated optics for communication, sensing, and actuation
4. High-sensitivity pressure sensor using a shielded polymer-coated fiber Bragg grating
5. High Sensitivity Force and Pressure Measurements Using Etched Singlemode Polymer Fiber Bragg Gratings
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