Sampling-mode scanning electron microscope for probing fast voltage waveforms
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_19760380?crawler=true&mimetype=application/pdf
Reference5 articles.
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Electron Beam Testing: An Outline of Techniques;VLSI Electronics Microstructure Science;1989
2. Voltage Measurement in the Scanning Electron Microscope;Advances in Electronics and Electron Physics Volume 69;1987
3. SEM Methods for the Characterization of Semiconductor Materials and Devices;Nondestructive Evaluation of Semiconductor Materials and Devices;1979
4. SEM stroboscopy for the evaluation of IC operating functions in the subnanosecond range;Review of Scientific Instruments;1978-06
5. High-resolution sampling SEM for quantitative investigations of semiconductor devices and integrated circuits;IEEE Transactions on Electron Devices;1978-04
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