Voltage Measurement in the Scanning Electron Microscope
Author:
Publisher
Elsevier
Reference72 articles.
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Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Multiple contacts investigation of single silicon nanowires with the active voltage contrast scanning electron microscopy technique;Measurement Science and Technology;2018-12-13
2. Electron Optics of Low-Voltage Electron Beam Testing and Inspection. Part I: Simulation Tools ✶ ✶Reprinted from Advances in Optical and Electron Microscopy, vol. 13, 1994, 123–242.;Advances in Imaging and Electron Physics;2018
3. Microcharacterization;The Physics of Micro/Nano-Fabrication;1992
4. First results with a high‐imaging speed scanning electron microscope;Review of Scientific Instruments;1990-10
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