Author:
Schjølberg-Henriksen K.,Fjeldly T.A.,Santander J.,Plaza J.A.,Hanneborg A.
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Reference10 articles.
1. Low stress packaging of a micromachined accelerometer
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4. MPW process of SensoNor ASA, Knudsrødveien 7, N-3191 Horten, Norway
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