Embedded optical interconnections using thin film InGaAs metal-semiconductor-metal photodetectors
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_20021047?crawler=true&mimetype=application/pdf
Reference6 articles.
1. Rationale and challenges for optical interconnects to electronic chips
2. Fully embedded board-level guided-wave optoelectronic interconnects
3. Efficient optical coupling between a polymeric waveguide and an ultrafast silicon MSM photodiode
4. Thin-film inverted MSM photodetectors
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1. Low-dark-current waveguide InGaAs metal–semiconductor–metal photodetector monolithically integrated with InP grating coupler on III–V CMOS photonics platform;Japanese Journal of Applied Physics;2016-02-25
2. Surface Leakage Reduction in MSM InGaAs Photodetector on III–V CMOS Photonics Platform;IEEE Photonics Technology Letters;2015-07-15
3. A polymer waveguide grating sensor integrated with a thin-film photodetector;Journal of Optics;2013-11-27
4. Integration of inverted InGaAs MSM array on Si substrate through low temperature wafer bonding;Electronics Letters;2012
5. Thin film edge emitting lasers integrated onto silicon;Novel In-Plane Semiconductor Lasers IX;2010-02-11
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