Author:
Shi Zhongshun,Qin Ming,Chen Weiwei,Gao Siyang,Shi Leyuan
Cited by
1 articles.
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1. High Precision Image Stabilization Control for Wafer Defect Inspection;2023 IEEE 13th International Conference on CYBER Technology in Automation, Control, and Intelligent Systems (CYBER);2023-07-11